• 专利附录
  • 专利说明
  • 权利要求
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  • 同族专利
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    • 专利摘要:
    Method for directly bonding an electronic chip (100) to a substrate (102) or to another electronic chip, comprising the steps of: hydrophilic treatment of a portion (105) of a chip face and a portion (110) of a face (108) of the substrate or other electronic chip; depositing an aqueous fluid (112) on the part of the face of the substrate or of the second electronic chip; depositing the part of the face of the electronic chip on the aqueous fluid; drying the aqueous fluid until the part of the face of the electronic chip is secured to the part of the face of the substrate or of the other electronic chip; and further comprising, during at least a portion of the drying of the aqueous fluid, ultrasound emission into the aqueous fluid through the substrate or other electronic chip.
    公开号:FR3039700A1
    申请号:FR1557402
    申请日:2015-07-31
    公开日:2017-02-03
    发明作者:Frank Fournel；Xavier Baillin；Severine Cheramy；Patrick Leduc；Loic Sanchez
    申请人:Commissariat a lEnergie Atomique CEA；Commissariat a lEnergie Atomique et aux Energies Alternatives CEA；
    IPC主号:
    专利说明:

    METHOD OF DIRECT COLLAGE WITH ULTRASOUND SELF ALIGNMENT
    DESCRIPTION
    TECHNICAL FIELD AND PRIOR ART The invention relates to a self-aligned direct bonding process of at least one electronic chip on a substrate or on at least one other electronic chip. The term chip (also called "Die" or "Chip" in English), a portion of a substrate having or not already undergone technological steps of microelectronics forming for example electronic components in this part of the substrate. Such an electronic chip can correspond to an integrated circuit. The term "substrate" is intended to mean a plate or a wafer (for example in semiconductor (generally made of silicon), whether or not already undergoing technological steps of microelectronics forming, for example, electronic components. in the substrate. These technological steps in microelectronics are, for example, lithography, etching and deposition steps.
    Direct bonding, also known as "molecular bonding", or "wafer bonding" or "direct bonding" in English, is an assembly technique that makes it possible to join two surfaces by putting these two surfaces in direct contact without resorting to a bonding material (glue, wax, etc.). In this type of bonding, the adhesion is obtained thanks to the fact that the surfaces to be bonded are sufficiently smooth (typically with a roughness of the order of 0.5 nm RMS (Roughness Mean Square)), free of particles or contaminations , and close enough to one another to allow to initiate an intimate contact between the surfaces. In this case, the attractive forces between the two surfaces are high enough to cause molecular bonding of the two surfaces with each other. Molecular bonding is induced by all the attractive forces of electronic interaction between the atoms or molecules of the two surfaces to be bonded (Van der Waals forces). Heat treatments can be performed during or after gluing to increase the bonding energy between the assembled surfaces.
    Such direct bonding may correspond to a so-called "hydrophobic" bonding, for example between two monocrystalline silicon substrates. In this case, with two substrates of crystalline silicon, direct bonding then forms a crystalline "connection" between the bonded materials. Direct bonding may also correspond to a so-called "hydrophilic" bonding, for example between two substrates of oxidized silicon. In such a hydrophilic bonding, a film of water present between the two substrates makes it possible to obtain stronger hydrogen bonding interactions than the Van der Waals forces.
    To achieve a direct self-aligned hydrophilic bonding of an electronic chip on a substrate or on another electronic chip, it is possible to use various self-alignment techniques using a fluid as self-aligning media. For example, in the paper "Multichip Self-Assembly Technology for Advanced Die-to-Wafer 3-D Integration to Prcisely Align Known Good Dies in Batch Processing" by T. Fukushima et al., IEEE Transactions on Components, Packaging and Manufacturing Technology. , flight. 1, No. 12, December 2011, pages 1873-1884, there is described a means of self-aligning an electronic chip on a substrate having hydrophilic and hydrophobic zones via the use of a drop of water confined to a hydrophilic zone corresponding to the location of the chip. The chip is disposed on the drop of water which allows an alignment of the chip vis-à-vis its location on the substrate. The disadvantage of these techniques is that they do not allow to explore all possible alignment configurations to then choose the optimal configuration conferring the best alignment of the chip on the substrate. In the process described in the document cited above, if the chip is misaligned a few tenths of a degree after a first positioning on the substrate, this misalignment, which may be the consequence of various reasons such as the presence of capillary forces parasites suffered by the chip, may persist until the complete bonding of the chip on the substrate.
    STATEMENT OF THE INVENTION
    An object of the present invention is to propose a method of self-aligned direct bonding of an electronic chip to a substrate or to another electronic chip, using a fluid as a self-aligning medium and having a better self efficiency. Aligning that the bonding methods of the prior art.
    For this purpose, the invention proposes a process for direct bonding of at least one first electronic chip to a substrate or to at least one second electronic chip, comprising at least the steps of: - making, on each of one face of the first chip and a first face of the substrate or the second electronic chip, at least first and second parts having a contact angle difference to a first fluid which is greater than about 70 ° to each other, such that the first portions have contact angles to the first fluid lower than those of the second portions and have substantially similar shapes and dimensions, one for relative to each other, and such that, on each of the face of the first electronic chip and the first face of the substrate or the second electronic chip, the first part is delimited by the second part; depositing the first fluid on the first part of the first face of the substrate or the second electronic chip; depositing the first part of the face of the first electronic chip on the first fluid; removing the first fluid until the first part of the face of the first electronic chip is secured to the first part of the first face of the substrate or of the second electronic chip; and further comprising, during at least a portion of the removal of the first fluid, an ultrasound emission in the first fluid through the substrate or the second electronic chip.
    Thanks to the emission of ultrasound in the first fluid during the withdrawal phase of the first fluid, the first electronic chip is subjected to a mechanical disturbance during the withdrawal of the first fluid, that is to say during the aligning the first electronic chip with respect to the first portion of the first face of the substrate or the second electronic chip. This self-alignment is dictated by the minimization of the wetting energy vis-à-vis the parts that have different contact angles. The ultrasound passes through the substrate or the second electronic chip and then propagates in the first media fluid to the self-alignment of the first electronic chip. These ultrasounds can then, depending on the power with which they are emitted, either exert a mechanical pressure on the first electronic chip, or create cavitation bubbles in the first fluid which will exert around them a mechanical pressure on the first electronic chip, changing the position of the first electronic chip and allowing the self-alignment forces to which the first electronic chip is subjected to resume amplitude. By being exposed to ultrasound, the first electronic chip will oscillate around the optimal alignment position to then reach, at the end of the removal of the first fluid, this optimal alignment position.
    Advantageously, the first fluid may be water.
    The emitted ultrasound may have a frequency greater than or equal to about 1 MHz. Such ultrasounds are also called megasons. In general, the ultrasound used may have a frequency of between about 10 kHz and 10 MHz.
    Ultrasound can be emitted with a power of between about 0.1 W / cm 2 and 5 W / cm 2.
    Advantageously, during a first part of the withdrawal of the first fluid, the emission power of the ultrasound may be greater than or equal to about 1 W / cm 2, then, during a second part of the withdrawal of the first fluid, the transmission power ultrasound can be reduced to a value of less than or equal to about 0.2 W / cm 2. Thus, cavitation bubbles are created in the first fluid during the first part of the withdrawal of the first fluid, thus ensuring a good mechanical action on the first chip. The oscillation of the first electronic chip then decreases during the second part of the withdrawal until the first electronic chip is at its optimum alignment at the end of the withdrawal of the first fluid.
    The ultrasound may be emitted by an emitter acoustically coupled to a second face, opposite to the first face, the substrate or the second electronic chip via a film of a second fluid. The second fluid may be of a similar nature or not to the first fluid. Such a configuration ensures good transmission of ultrasound into the first fluid between the first chip and the substrate or between the first and second chips. The expression "fluid film" here designates a thin layer of fluid, for example with a thickness of between about 10 μm and 10 cm.
    Advantageously, the second fluid may be water.
    The embodiment, on the face of the first electronic chip and / or on the first face of the substrate or of the second electronic chip, of the first and second parts may comprise the implementation of a step of etching the face of the first electronic chip and / or the first face of the substrate or the second electronic chip around first regions for forming the first portions such that the first portions are formed by upper faces of the first regions and the second portions are formed at least by lateral flanks of the first regions. This etching performs steps, or protruding areas, vis-à-vis the rest of the face of the first chip and / or the first face of the substrate or the second chip. Thus, on the face of the first electronic chip and / or on the first face of the substrate or of the second electronic chip, the difference in contact angle between the first and second parts is obtained at least by these steps, or these differences. level, of which at least the side flanks correspond to the second part. Advantageously, the edges of these steps, which delimit the first parts vis-à-vis the second parts, are sharp, that is to say are such that the angle formed between the side flanks and the upper faces of these steps corresponds to a re-entrant angle of less than about 90 °.
    In this case, the method may further comprise, after the etching step, a processing step modifying the value of the contact angle of the lateral flanks of the first regions and / or the contact angle of second regions surrounding the first regions, vis-à-vis the first fluid. When the first fluid is water and the treatment corresponds to a hydrophobic treatment, thus surrounding a hydrophilic zone (first part) with a sharp edge and a hydrophobic etching flank (second part), the hydrophilic zone is very well delimited, which allows to better locate the first fluid on this hydrophilic zone. The presence of the stop between the first and second parts adds to the contact angle difference between the two parts an additional angle, for example 90 °.
    The removal of the first fluid may advantageously comprise an evaporation of the first fluid.
    The process steps can be implemented collectively to achieve the direct bonding of several first chips on the substrate. Thus, a plurality of first low contact angle portions may be delimited by one or more second high contact angle portions on the first face of the substrate, thereby achieving self-alignment, sequentially or advantageously simultaneously, of the first electronic chips on the substrate.
    BRIEF DESCRIPTION OF THE DRAWINGS
    The present invention will be better understood on reading the description of exemplary embodiments given purely by way of indication and in no way limiting, with reference to the appended drawings in which: FIGS. 1 to 5 show the steps of a direct bonding process object of the present invention, according to a particular embodiment.
    Identical, similar or equivalent parts of the different figures described below bear the same numerical references so as to facilitate the passage from one figure to another.
    The different parts shown in the figures are not necessarily in a uniform scale, to make the figures more readable.
    The different possibilities (variants and embodiments) must be understood as not being exclusive of each other and can be combined with one another.
    DETAILED PRESENTATION OF PARTICULAR EMBODIMENTS
    An example of implementation of a method of direct bonding of an electronic chip 100 on a substrate 102 is described in connection with FIGS. 1 to 5.
    The electronic chip 100, here in silicon, is obtained by sawing a plate, or substrate, of silicon of crystalline orientation <001>, of diameter equal to about 200 mm and of resistivity of between about 1 and 14 Ohm / cm. with a p-type doping. The dimensions of the chip are here equal to about 1 mm * 1 mm (in a plane parallel to the plane (X, Y) in FIG. 1) and its thickness (dimension along the Z axis) is equal to about 725 pm. The electronic chip 100 corresponds to a portion of semiconductor having already undergone technological steps of microelectronics forming for example electronic components on this electronic chip 100. Such components (not shown in Figures 1 to 5) can be present at a rear face 103 and / or a front face 104 of the electronic chip 100.
    The electronic chip 100 comprises, at its front face 104 which corresponds to that intended to be secured to the substrate 102, a first portion 105 which corresponds to the region of the front face 104 intended to be in contact with the substrate 102. second part 106 of the front face 104 which surrounds the first part 105 corresponds to an engraved part of the electronic chip 100 and forming a step at the edges of the electronic chip 100. The first part 105 is for example formed by an upper face a silicon oxide layer 107 disposed on a projecting portion 109, for example of silicon, of the electronic chip 100. The second part 106 comprises the lateral flanks of the projecting portion 109 and of the layer 107 as well as the others parts of the front face 104, also of silicon, which are around the first part 105. The difference between the contact angle of the first part 105 and that of the second part Part IX 106 is greater than about 70 °.
    The etching forming the second portion 106 of the front face 104 is performed before the cutting of the electronic chip 100, for example by photolithography and HF etching. After cutting, the electronic chip 100 is cleaned by brushing with an ammonia solution (deionized water with 1% ammonia) to remove particulate contamination. The electronic chip 100 is then subjected to an oxygen plasma treatment to remove the hydrocarbon contamination still present. These chemical treatments make it possible to render the first portion 105 of the front face 104 hydrophilic. The use of a solution of hydrofluoric acid or of a hydrogen plasma makes it possible to hydrophobize the material which is revealed by this etching, at the level of the second portion 106 of the front face 104, while leaving the first portion 105 hydrophilic.
    Alternatively, it is possible that the etched areas of the electronic chip 100, located at the periphery of the projecting portion 109, are covered with silicon oxide. In this case, the second portion 106 is formed only of the lateral flanks of the projecting portion 109 and the layer 107, and not of the silicon oxide present around the projecting portion 109.
    At the front face 104, a step having a surface (upper surface of the layer 107) having a low contact angle (first portion 105), for example hydrophilic, surrounded by the second portion 106 having a high contact angle, for example hydrophobic, is thus obtained. This configuration is advantageous because it makes it possible to increase by about 90 ° the difference in contact angle between the surface corresponding to the first part 105 and those formed by the second part 106. The angle formed between the upper face of the March and the rest of the front face 104 may be different from 90 °, and in particular greater than or less than 90 °.
    In another configuration, it is possible that the first and second parts 105, 106 are in the same plane at the front face 104, that is to say that the front face 104 has no projecting portion. The first and second portions 105, 106 are then made by spot treatments such that one or more hydrophilic first portions are surrounded by one or more hydrophobic second portions.
    The substrate 102, here a silicon substrate, is also prepared for direct bonding of the electronic chip 100 on a front face 108 of the substrate 102. For this, at least one trench is made by photolithography and etching in a part of the the thickness of the substrate 102, around a first portion 110 of the front face 108 on which the first portion 105 of the front face 104 of the electronic chip 100 is intended to be glued, in order to isolate this first portion 110 of the front face 108 of the substrate 102 vis-a-vis the remainder of the front face 108 of the substrate 102 forming a second portion 111. In Figure 1, the entire portion of the front face 108 of the substrate 102 being around the first part 110 is etched and forms the second portion 111 of this front face 108. This first portion 110 has a pattern and dimensions, in a main plane of the substrate 102 (plane parallel to the plane (X, Y)), similar to those of the first part 1 05 of the front face 104 of the electronic chip 100. The substrate 102 undergoes the same surface chemical treatments as those undergone by the electronic chip 100 in order to render the first portion 110 of the front face 108 of the substrate 102 hydrophilic and hydrophobic the remainder of the surface of the substrate 102 revealed by etching the portion of the front face 108 around the first portion 110 and forming the second portion 111 of the front face 108 of the substrate 102.
    In the example described here, the surfaces of the first parts 105 and 110 have a roughness compatible with the implementation of direct bonding, that is to say have a roughness of less than or equal to about 0.5 nm RMS .
    A drop of a fluid 112, here water, is then placed on the surface of the first portion 110 of the front face 108 of the substrate 102 for receiving the electronic chip 100 (Figure 2). This deposit can be done individually drop by drop. However, when the front face 108 of the substrate 102 has several first portions 110, the deposition of the drops 112 can be collective and be obtained for example by the implementation of a spraying or spreading of water on the front face 108, the excess water present on the front face 108 is then eliminated. The first portion 105 of the front face 104 of the electronic chip 100 is then placed on the drop 112 (Figure 3). The electronic chip 100 will roughly align to optimize its surface in contact with the substrate 102 and thus almost align the two surfaces of the first portions 105 and 110 intended to be secured to one another.
    Then, a withdrawal phase is implemented so that the drop 112 evaporates and that the surfaces of the parts 105 and 110 are secured to one another. During this phase of withdrawal, an ultrasound emitter 114 is acoustically coupled to a rear face 116 of the substrate 102 and emits through this rear face 116 ultrasound for example of frequency equal to or greater than about 1 MHz and higher power or equal to about 0.2 W / cm2. The acoustic coupling of the emitter 114 with the rear face 116 of the substrate 102 is produced by means of a film of a second fluid 118, advantageously a film of water (see FIG. 4).
    The acoustic waves emitted by the transmitter 114 will pass through the film 118, the substrate 102 and the drop 112 to reach the electronic chip 100. The electronic chip 100 undergoes a vertical mechanical stress, that is to say in a direction substantially perpendicular to the desired bonding interface, via the media formed by the drop 112 between the electronic chip 100 and the substrate 102. The mechanical action of the acoustic waves will then move the electronic chip 100 and will oscillate around the equilibrium position, or optimum alignment position, which corresponds to that conferring the best alignment of the surfaces facing each other (see Figure 5).
    If the transmission power of the ultrasound is greater than or equal to about 1 W / cm 2, cavitation bubbles appear in the drop 112, reinforcing the mechanical action of the ultrasound on the electronic chip 100. Advantageously, during the withdrawal of the drop 112, the ultrasound is sent first with a significant power greater than or equal to about 1 W / cm2. During removal of the droplet 112, this power is gradually reduced to a value of less than or equal to about 0.2 W / cm 2. This progressive reduction of the ultrasound emission power makes it possible to optimize the alignment of the electronic chip 100 with respect to the first portion 110 of the front face 108 of the substrate 102. The emission of the ultrasounds can be interrupted either before the complete removal of the droplet 112 and thus the attachment of the electronic chip 100 on the substrate 102, or once the attachment of the electronic chip 100 on the substrate 102 is completed.
    The direct bonding method previously described can be applied to the bonding of the electronic chip 100 not on the substrate 102 but on a second electronic chip. It is also possible that this direct bonding process is implemented collectively to simultaneously achieve a direct bonding of several electronic chips to the substrate 102.
    Alternatively, the first fluid of the droplet 112 and / or the second fluid of the film 118 may be replaced by a fluid other than water, polar or apolar, for example methanol, acetone, dimethylsulfonic acid, acetonitrile, pyridine, ammonia, ethanol, hexane, pentane, benzene, toluene, chloroform, etc.
    The substrate 102 and / or the chip 100 may be made from a material other than silicon. In addition, in place of the silicon oxide of the layer 107, this layer may be formed of a semiconductor oxide other than silicon, or else for example a semiconductor nitride, of alumina, SiOC, HfC> 2, a metal (Ti, Cu, Ni, etc.), or carbon.
    After removal of the drop 112, the elements secured by the direct bonding may be subjected to one or more heat treatments for reinforcing the adhesion forces, and therefore the bonding energy, between these elements. When electronic components are present on at least one of these elements, the temperatures of these heat treatments may be between about 200 ° C and 400 ° C. Otherwise, the heat treatment temperatures can be up to about 1100 ° C.
    Such a direct bonding method advantageously applies to the field of 3D microelectronics for bonding electronic chips comprising CMOS components on a substrate comprising CMOS components, as well as to the field of optoelectronics for producing chip bonding. III / V-based semiconductor electronics, for example comprising laser components, on a silicon substrate having CMOS components.
    权利要求:
    Claims (10)
    [1" id="c-fr-0001]
    1. A process for directly bonding at least one first electronic chip (100) to a substrate (102) or to at least one second electronic chip, comprising at least the steps of: - making, on each of a face (104) ) of the first electronic chip (100) and a first face (108) of the substrate (102) or the second electronic chip, of at least first and second parts (105, 110,10, 111,111) having a difference in angle of contact with a first fluid (112) which is greater than about 70 ° relative to each other, such that the first portions (105, 110) have contact angles to the first fluid (112) lower than those of the second parts (106,111) and have shapes and dimensions substantially similar to each other, and such that, on each of the face (104) of the first microchip (100) and the first face (108) of the substrate (102) or the second electronic chip, the first part (105, 110) is delimited by the second part (106, 111); depositing the first fluid (112) on the first portion (110) of the first face (108) of the substrate (102) or the second electronic chip; depositing the first portion (105) of the face (104) of the first electronic chip (100) on the first fluid (112); - removing the first fluid (112) until a securing of the first portion (105) of the face (104) of the first chip (100) with the first portion (110) of the first face (108) the substrate (102) or the second electronic chip; and further comprising, during at least a portion of the removal of the first fluid (112), ultrasound emission in the first fluid (112) through the substrate (102) or the second electronic chip.
    [2" id="c-fr-0002]
    The method of claim 1, wherein the first fluid (112) is water.
    [3" id="c-fr-0003]
    3. Method according to one of the preceding claims, wherein the emitted ultrasound has a frequency greater than or equal to about 1 MHz.
    [4" id="c-fr-0004]
    4. Method according to one of the preceding claims, wherein the ultrasound is emitted with a power of between about 0.1 W / cm2 and 5 W / cm2.
    [5" id="c-fr-0005]
    5. Method according to one of the preceding claims, wherein, during a first part of the removal of the first fluid (112), the ultrasound emission power is greater than or equal to about 1 W / cm2, then, during a second part of the removal of the first fluid (112), the ultrasound emission power is reduced to a value of less than or equal to about 0.2 W / cm 2.
    [6" id="c-fr-0006]
    6. Method according to one of the preceding claims, wherein the ultrasound is emitted by a transmitter (114) acoustically coupled to a second face (116), opposite to the first face (108), the substrate (102) or the second electronic chip via a film of a second fluid (118).
    [7" id="c-fr-0007]
    The method of claim 6, wherein the second fluid film (118) is a water film.
    [8" id="c-fr-0008]
    8. Method according to one of the preceding claims, wherein the embodiment, on the face (104) of the first electronic chip (100) and / or on the first face (108) of the substrate (102) or the second chip electronic, first and second parts (105,106,110,111) comprises the implementation of a step of etching the face (104) of the first electronic chip (100) and / or the first face (108) of the substrate (102) or the second electronic chip around first regions for forming the first portions (105, 110) such that the first portions are formed by upper faces of the first regions and the second portions are formed at least by side flanks of the first regions.
    [9" id="c-fr-0009]
    9. The method of claim 8, further comprising, after the etching step, a processing step modifying the value of the contact angle of the side flanks of the first regions and / or the contact angle of second regions. surrounding the first regions, vis-à-vis the first fluid.
    [10" id="c-fr-0010]
    10. Method according to one of the preceding claims, wherein the process steps are implemented collectively to achieve the direct bonding of several first chips (100) on the substrate (102).
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    法律状态:
    2016-07-29| PLFP| Fee payment|Year of fee payment: 2 |
    2017-02-03| PLSC| Publication of the preliminary search report|Effective date: 20170203 |
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    申请号 | 申请日 | 专利标题
    FR1557402A|FR3039700B1|2015-07-31|2015-07-31|METHOD OF DIRECT COLLAGE WITH ULTRASOUND SELF ALIGNMENT|FR1557402A| FR3039700B1|2015-07-31|2015-07-31|METHOD OF DIRECT COLLAGE WITH ULTRASOUND SELF ALIGNMENT|
    EP16751221.9A| EP3329511B1|2015-07-31|2016-07-26|Method for direct bonding with self-alignment using ultrasound|
    US15/746,041| US10438921B2|2015-07-31|2016-07-26|Method for direct bonding with self-alignment using ultrasound|
    JP2018504844A| JP6887416B2|2015-07-31|2016-07-26|Method for direct coupling with self-alignment using ultrasound|
    PCT/EP2016/067827| WO2017021231A1|2015-07-31|2016-07-26|Method for direct bonding with self-alignment using ultrasound|
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